Acoustic wave device
US9935610B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 21, 2015 |
| Grant date | Apr 3, 2018 |
| Priority date | — |
| Expiry date | Jul 26, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/11
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The present invention relates to an acoustic wave device including: a substrate; an IDT arranged on the substrate; a connection electrode arranged on the substrate and electrically connected to the IDT; a side wall formed outside the IDT to create a cavity including the IDT on the substrate; a cover formed on a top of the side wall; a connection terminal penetrating the side wall or the cover or formed along an inner or outer peripheral surface of the side wall, and electrically connected to the connection electrode; and a conductive layer formed on a top of the cover not to be overlapped with the connection terminal, in which an area of the conductive layer is less than 50% of an area of the cover.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.