MEMS microphone
US9936306B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 10, 2017 |
| Grant date | Apr 3, 2018 |
| Priority date | — |
| Expiry date | Jul 10, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The invention discloses a MEMS microphone, which includes a case with an accommodating cavity and an acoustic vent arranged on the case, a housing with an empty cavity as well as MEMS and ASIC chips with a back cavity are arranged inside the accommodating cavity. The housing is installed on the case, the MEMS chips are installed in the housing, the housing is arranged with a through hole connecting the empty cavity and the back cavity. The housing is also arranged with a vent hole. The MEMS microphone also includes a membrane flap arranged on the housing and used to close the vent hole. The membrane flap changes its shape under airflow effects and opens the vent hole. The MEMS microphone of this invention can avoid the diaphragm of the MEMS chips being damaged by airflow impact.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.