Method for producing a three-dimensional structure

US9937664B2 · kind B2 · utility

Assignee

• Nanoscribe Holding GmbH · DE

Inventors

• Michael Thiel · Karlsruhe, DE
• Roman Reinhard Reiner · Karlsruhe, DE
• Fabian Niesler · Karlsruhe, DE
• Yann Tanguy · Linkenheim-Hochstetten, DE

Key dates

• Filing date: Sep 29, 2015
• Grant date: Apr 10, 2018
• Expiry date: Aug 10, 2036

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B33Y10/00
• WIPO field: Other special machines
• WIPO sector: Mechanical engineering

Abstract

A method for producing a three-dimensional structure (10) in a lithographic material (24) that can be polymerized and thus solidified using energy input methods, wherein initially a shell wall (16) of the three-dimensional structure (10) to be produced is polymerized so as to form a polymerized shell wall (16) such that a volume (28) of unpolymerized lithographic material is enclosed using a first, spatially resolving energy input method, wherein the lithographic material (24) surrounding the polymerized shell wall (16) is removed in an intermediate development step, wherein subsequently the volume (28) enclosed by the shell wall (16) is polymerized using a second energy input method.