B2F4 manufacturing process
US9938156B2 · kind B2 · utility
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39References
8Claims
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Inventors
Key dates
| Filing date | Oct 9, 2012 |
| Grant date | Apr 10, 2018 |
| Priority date | — |
| Expiry date | Feb 25, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P20/141
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A reaction system and method for preparing compounds or intermediates from solid reactant materials is provided. In a specific aspect, a reaction system and methods are provided for preparation of boron-containing precursor compounds useful as precursors for ion implantation of boron in substrates. In another specific aspect, a reactor system and methods are provided for manufacture of boron precursors such as B2F4.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.