Amplified passive and reversible micro-sensor of deformations
US9939246B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 1, 2014 |
| Grant date | Apr 10, 2018 |
| Priority date | — |
| Expiry date | Aug 12, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosed micro-sensor includes: a substrate including a first portion and a second portion; a third portion and fourth portion provided between the portions and connected to the first portion and the second portion respectively by an elastic member; detection and a counter including: a counting gear, a third beam capable of meshing with the gear, an amplifier for the value of a relative movement between the portions and including: a first beam attached at one end thereof to the third portion and at the other end thereof to a plate, a second beam attached at one end thereof to the fourth portion and at the other end thereof to the plate, the third beam being attached on one side to the plate and including a tooth capable of meshing with the gear.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.