On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer
US9939587B2 · kind B2 · utility
4Cited by
4References
18Claims
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Key dates
| Filing date | Aug 29, 2016 |
| Grant date | Apr 10, 2018 |
| Priority date | — |
| Expiry date | Aug 29, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/281
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An on-chip optical filter having Fabri-Perot resonators and a spectrometer may include a first sub-wavelength grating (SWG) reflecting layer and a second SWG reflecting layer facing each other. A plurality of Fabri-Perot resonators are formed by the first SWG reflecting layer and the second SWG reflecting layer facing each other. Each of the Fabri-Perot resonators may transmit light corresponding to a resonance wavelength of the Fabri-Perot resonator. The resonance wavelengths of the Fabri-Perot resonators may be determined according to duty cycles of grating patterns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.