Method and device for producing masks for a laser installation
US9939725B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 22, 2010 |
| Grant date | Apr 10, 2018 |
| Priority date | — |
| Expiry date | Jun 18, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24479
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
In the method for producing masks and/or diaphragms for a laser installation for the creation of microstructures on a solid body surface according to the mask projection technique, predetermined opaque surface portions which scatter the laser radiation are produced in the mask and/or diaphragm substrate by roughening and modifying the latter by means of a femtosecond, picosecond or fluor laser beam. Such masks and diaphragms have a strongly improved lifetime and accuracy and may e.g. serve for the creation of blazed gratings which, arranged in diffraction grating arrays on a solid body surface, serve for producing spectral colors and mixed colors of high brilliance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.