Patent · US Active

Method and device for producing masks for a laser installation

US9939725B2 · kind B2 · utility

11Cited by
15References
36Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 22, 2010
Grant dateApr 10, 2018
Priority date
Expiry dateJun 18, 2031

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/24479
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

In the method for producing masks and/or diaphragms for a laser installation for the creation of microstructures on a solid body surface according to the mask projection technique, predetermined opaque surface portions which scatter the laser radiation are produced in the mask and/or diaphragm substrate by roughening and modifying the latter by means of a femtosecond, picosecond or fluor laser beam. Such masks and diaphragms have a strongly improved lifetime and accuracy and may e.g. serve for the creation of blazed gratings which, arranged in diffraction grating arrays on a solid body surface, serve for producing spectral colors and mixed colors of high brilliance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.