Cesium primary ion source for secondary ion mass spectrometer

US9941089B2 · kind B2 · utility

Assignee

• ARIZONA BOARD OF REGENTS, A BODY CORPORATE OF THE STATE OF ARIZONA ACTING FOR AND ON BEHALF OF ARIZONA STATE UNIVERSITY · US

Inventors

• Peter Williams · San Carlos, US
• Karen Williams · Norton, GB
• Maitrayee Bose · Tempe, US
• John Prince · Kettleby, CA

Key dates

• Filing date: Oct 13, 2015
• Grant date: Apr 10, 2018
• Expiry date: Oct 13, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H03L7/26
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A primary ion source subassembly for use with a secondary ion mass spectrometer may include a unitary graphite ionizer tube and reservoir base. A primary ion source may include a capillary insert defining an ionizer aperture. An ionizer aperture may be centrally arranged in an outwardly protruding conical or frustoconical surface, and may be overlaid with a refractory metal coating or sheath. Parameters including ionizer surface shape, ionizer materials, ionizer temperature, and beam stop plate orifice geometry may be manipulated to eliminate ghost images. A graphite tube gasket with a dual tapered surface may promote sealing of a source material cavity.