Thermo-compression bonding tool with high temperature elastic element
US9944055B2 · kind B2 · utility
1Cited by
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16Claims
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Key dates
| Filing date | Jun 26, 2015 |
| Grant date | Apr 17, 2018 |
| Priority date | — |
| Expiry date | Feb 22, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB32B2457/12
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A thermo-compression bonding tool with a high temperature elastic element, and methods of bonding a metal sheet to a substrate using a thermo-compression bonding tool are described. In an example, a system for bonding a metal sheet to a substrate includes a stage to support the substrate and an elastic roller located above the stage. The elastic roller includes a high temperature material. The system also includes a heated backing plate located above the elastic roller. The backing plate is configured to apply pressure and heat to the elastic roller as the elastic roller rolls across a metal sheet disposed above the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.