MEMS device, liquid ejecting head, liquid ejecting apparatus, manufacturing method of MEMS device, and manufacturing method of liquid ejecting head
US9944077B2 · kind B2 · utility
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3Claims
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Key dates
| Filing date | Sep 7, 2016 |
| Grant date | Apr 17, 2018 |
| Priority date | — |
| Expiry date | Sep 7, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/18
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A MEMS device includes a first substrate; a second substrate that is disposed laminated on the first substrate; and a functional element that is disposed between the first substrate and the second substrate, in which the second substrate is smaller than the first substrate, and in planar view, an end portion of the second substrate is disposed inside an end portion of the first substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.