Method for producing cubic zirconia layers
US9945024B2 · kind B2 · utility
1Cited by
9References
30Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 24, 2010 |
| Grant date | Apr 17, 2018 |
| Priority date | — |
| Expiry date | Nov 29, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In order to produce zirconia-based layers on a deposition substrate, wherein reactive spark deposition using pulsed spark current and/or the application of a magnetic field that is perpendicular to the spark target are employed, a mixed target comprising elemental zircon and at least one stabilizer is used, or a zirconium target comprising elemental zirconium is used, wherein in addition to oxygen, nitrogen is used as the reactive gas. As an alternative, combined with the use of the mixed target, nitrogen can also be used as the reactive gas in addition to oxygen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.