Measurement system including a network of nanoelectromechanical system resonators
US9945822B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2013 |
| Grant date | Apr 17, 2018 |
| Priority date | — |
| Expiry date | May 25, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02496
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a measurement system including a network of nanoelectromechanical system (NEMS) resonators, characterized in that: each one of said resonators includes: an electrostatic activation device capable of generating a vibration of a beam exposed to said excitation signal, at least one piezoresistive stress gauge made of a doped semiconducting material, extending from the beam so as to detect a movement of said beam, the variation in the electrical resistance of said at least one gauge supplying an output signal; said network includes at least two groups of resonators, each group including at least two resonators having an identical empty resonance frequency, each group of resonators having an empty resonance frequency different from that of each other group; the resonators forming each group are connected in parallel; the groups of resonators forming said network are connected in parallel; said system includes a reading device designed to supply an excitation signal at the network input and to determine the resonance frequency of a group of resonators which is selected by injecting, into said excitation signal, a frequency component corresponding to the empty res…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.