Predictive analysis of complex datasets and systems and methods including the same
US9945825B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 29, 2014 |
| Grant date | Apr 17, 2018 |
| Priority date | — |
| Expiry date | Oct 31, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2035/009
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Predictive analysis of complex datasets and systems and methods including the same are disclosed herein. The methods include analyzing airborne particle count data from a cleanroom environment to predict a particle count fault condition within the cleanroom environment. The methods further include generating an airborne particle count data repository that includes particle counts within the cleanroom environment, analyzing the airborne particle count data to calculate a difference between a first rate of change and a second rate of change, and predicting the particle count fault condition responsive to the difference between the first rate of change and the second rate of change being outside a predetermined threshold range difference. The systems include computer readable storage media including computer-executable instructions that, when executed, direct a data analysis system to perform the methods. The systems also include a distributed cleanroom particle count monitoring system including a plurality of detection nodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.