Patent · US Active

Device and method for post-fabrication trimming of an optical ring resonator using a dopant-based heater

US9946027B2 · kind B2 · utility

1Cited by
2References
17Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 10, 2016
Grant dateApr 17, 2018
Priority date
Expiry dateApr 10, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02F1/025
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A device and method for post-fabrication trimming of an optical ring resonator using a dopant-based heater is provided. An optical ring resonator at the device can be heated using heaters in an optical slab from which the optical ring resonator extends, the heater including a non-uniform doping profile. A controller determines an initial resonance frequency and a target resonance frequency of the optical ring resonator. The controller applies predetermined electrical parameters to the heater using electrical connections to shift a resonance frequency of the optical ring resonator from the initial resonance frequency to the target resonance frequency by causing the dopant in the heater to migrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.