Method for producing a mask and the mask
US9946151B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 11, 2015 |
| Grant date | Apr 17, 2018 |
| Priority date | — |
| Expiry date | Nov 11, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/50
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Embodiments of the present disclosure provide a method for producing a mask and a mask obtained by this method. The mask is configured to shield light during an exposure of a product. The method includes steps of: producing a composite membrane, wherein the composite membrane includes a first protection layer, a bonding layer, a shielding layer and a second protection layer stacked in sequence; only cutting the first protection layer, the bonding layer and the shielding layer of the composite membrane, wherein a cutting line corresponds to a shape of an area to be exposed of the product; removing the first protection layer and cut portions of the bonding layer and the shielding layer which have a same shape as that of the area to be exposed; attaching the formed composite membrane onto a base substrate of an open mask, and removing the second protection layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.