Atomic beam source
US9947428B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2017 |
| Grant date | Apr 17, 2018 |
| Priority date | — |
| Expiry date | Feb 10, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K5/02
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An atomic beam source includes a tubular cathode that includes an emission portion that includes an emission port through which an atomic beam can be emitted, a rod-shaped first anode disposed inside the cathode, and a rod-shaped second anode disposed inside the cathode and spaced from the first anode. At least one selected from the group consisting of a shape of the cathode, a shape of the first anode, a shape of the second anode, and a positional relationship between the cathode, the first anode, and the second anode is predetermined so that emission of sputter particles resulting from collision of cations, which have been generated by plasma between the first anode and the second anode, with at least one selected from the cathode, the first anode, and the second anode is reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.