Method and technique to control MEMS DVC control waveform for lifetime enhancement
US9948212B2 · kind B2 · utility
1Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 2014 |
| Grant date | Apr 17, 2018 |
| Priority date | — |
| Expiry date | May 16, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03J2200/39
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention generally relates to a method of operating a MEMS DVC while minimizing impact of the MEMS device on contact surfaces. By reducing the drive voltage upon the pull-in movement of the MEMS device, the acceleration of the MEMS device towards the contact surface is reduced and thus, the impact velocity is reduced and less damage of the MEMS DVC device occurs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.