PZT-film laminated structure, liquid discharge head, liquid discharge device, liquid discharge apparatus, and method of making PZT-film laminated structure
US9950524B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 23, 2016 |
| Grant date | Apr 24, 2018 |
| Priority date | — |
| Expiry date | Dec 23, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/03
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A PZT-film laminated structure includes a substrate, a lower electrode on the substrate, an orientation control layer on the lower electrode, a PZT layer on the orientation control layer, and an upper electrode on the PZT layer. The PZT layer has a (100) or (001) main orientation in which a peak intensity of PZT (100) or (001) is 90% or greater relative to a peak intensity of all PZT peaks in an X-ray diffraction measurement. A ratio of a total value of a secondary ion intensity of Cl relative to a total value of a secondary ion intensity of Ti in the PZT layer is equal to or smaller than 0.03 when the secondary ion intensity of Cl and the secondary ion intensity of Ti in the PZT layer are measured in a direction of thickness of the PZT layer with a magnetic-field secondary ion mass spectrometry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.