Molybdenum-based target and process for producing a target by thermal spraying
US9951413B2 · kind B2 · utility
6Cited by
4References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 12, 2010 |
| Grant date | Apr 24, 2018 |
| Priority date | — |
| Expiry date | Apr 30, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3491
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A target of a nominal thickness includes molybdenum. The target has a lamellar microstructure and an oxygen content of less than 1000 ppm, preferably less than 600 ppm, and even more preferably less than 450 ppm. An electrical resistivity of the target is less than five times, preferably three times and more preferably twice the theoretical electrical resistivity of the compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.