Patent · US Active

Nanowire growth system having nanoparticles aerosol generator

US9951420B2 · kind B2 · utility

0Cited by
16References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 10, 2014
Grant dateApr 24, 2018
Priority date—
Expiry dateNov 10, 2034

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC30B29/60
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A nanoparticles aerosol generator is disclosed. The nanoparticles aerosol generator includes an evaporation chamber having a wall, a container containing a source material, and a heating device configured to heat the source material. The nanoparticles aerosol generator also includes a carrier gas source configured to blow a carrier gas toward the source material to generate a nanoparticles aerosol with nanoparticles of the source material suspended therein. The nanoparticles aerosol generator further includes a dilution gas source configured to supply a dilution gas into the chamber to flow substantially along the wall within the chamber and to dilute the nanoparticles aerosol.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.