Patent · US Active

Microbarometer with a bellows and with an interferometric transducer

US9952109B2 · kind B2 · utility

0Cited by

1References

11Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Serge Olivier · Gap, FR
Damien PONCEAU · Antony, FR

Key dates

Filing date	Dec 18, 2013
Grant date	Apr 24, 2018
Priority date	—
Expiry date	May 4, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01L11/02
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A microbarometer includes a reference base, a bellows having a first edge fixed to a reference surface of the base and having an elongation direction perpendicular to the reference surface. A cover closes a second edge of the bellows and sealingly insulates an interior volume thereof. The bellows configured such that variations in elongation are directly proportional to pressure variations induced by infrasonic waves. A reflective element is integral the cover and an interferometric component receives a beam from a source is integral with the reference surface of the base. An input/output optical path faces the reflective element and is parallel to the elongation direction of the bellows, so as to emit a beam fraction towards the reflective element and to sense the reflected beam after reflection from reflective element. The interferometric component including integrated optical guide lines and optical separation and combination zones within a substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.