Fluid-filled microchannels
US9953897B2 · kind B2 · utility
1Cited by
3References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 22, 2016 |
| Grant date | Apr 24, 2018 |
| Priority date | — |
| Expiry date | Jul 22, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L23/3738
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device comprises a first layer of a die. The first layer comprises a microchannel. The microchannel is partially filled with a liquid and partially filled with air. The die also comprises a second layer. The second layer of the die seals a top of the microchannel of the first layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.