Patent · US Active

Fluid-filled microchannels

US9953897B2 · kind B2 · utility

1Cited by
3References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 22, 2016
Grant dateApr 24, 2018
Priority date
Expiry dateJul 22, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L23/3738
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A device comprises a first layer of a die. The first layer comprises a microchannel. The microchannel is partially filled with a liquid and partially filled with air. The die also comprises a second layer. The second layer of the die seals a top of the microchannel of the first layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.