Optical biosensor and manufacturing method thereof
US9954134B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Nov 5, 2013 |
| Grant date | Apr 24, 2018 |
| Priority date | — |
| Expiry date | Dec 18, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/483
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical biosensor, and a method of manufacturing the same, includes a first layer, a second layer stacked on the first layer, a first grating coupler within the first layer and the second layer, and a second grating coupler within the first layer. The first grating coupler is configured to couple a light pattern provided to a front side of the optical biosensor. The second grating coupler is configured to output the light pattern coupled by the first grating coupler to a photoelectric conversion element on a rear side of the optical biosensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.