Nano- and micro-electromechanical resonators
US9954512B2 · kind B2 · utility
1Cited by
1References
16Claims
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Key dates
| Filing date | Jul 11, 2017 |
| Grant date | Apr 24, 2018 |
| Priority date | — |
| Expiry date | Jul 11, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/241
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A resonator including a piezoelectric plate and an interdigital electrode is provided. A ratio between a thickness of the plate and a pitch of the interdigital electrode may be from about 0.5 to about 1.5. A radiation detector including a resonator and an absorber layer capable of absorbing at least one of infrared and terahertz radiation is provided. A resonator including a piezoelectric plate and a two-dimensional electrically conductive material is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.