Patent · US Active

Methods and apparatus for anchoring resonators

US9954513B1 · kind B1 · utility

3Cited by

33References

20Claims

0Family size

Assignee

Analog Devices, Inc. · US

Inventors

Florian Thalmayr · Unterhaching, DE
Andrew Sparks · Honolulu, US
Jan H. Kuypers · Cambridge, US

Key dates

Filing date	Dec 20, 2013
Grant date	Apr 24, 2018
Priority date	—
Expiry date	Feb 22, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/155
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Methods and apparatus for anchoring resonators, such as microelectromechanical systems (MEMS) resonators. A resonator may include a substrate, a mechanical resonating structure, and at least one anchor. The mechanical resonating structure may be configured to resonate in a resonance mode of vibration at a frequency. The anchor may couple the mechanical resonating structure to the substrate. The anchor may be configured to exhibit an acoustic bandgap at the frequency of the resonance mode of vibration of the mechanical resonating structure. The anchor may be oriented in a direction substantially parallel to a direction of propagation of the resonance mode of vibration of the mechanical resonating structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.