Method for manufacturing a device comprising a hermetically sealed vacuum housing and getter
US9957154B2 · kind B2 · utility
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2References
6Claims
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Assignee
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Key dates
| Filing date | Jul 7, 2015 |
| Grant date | May 1, 2018 |
| Priority date | — |
| Expiry date | Jul 7, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/48091
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of manufacturing a device having a microelectronic component housed in a hermetically sealed vacuum housing, including forming a getter in said housing, pumping out and heating the device to degas elements housed in said housing, after said pumping, hermetically sealing the housing in fluxless fashion.Further, each material forming the device likely to degas into the inner space is a mineral material, the getter is capable of substantially trapping hydrogen only and is inert to oxygen and/or to nitrogen and the heating and the sealing are performed at a temperature lower than 300° C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.