Specimen measuring device and computer program product
US9958265B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2015 |
| Grant date | May 1, 2018 |
| Priority date | — |
| Expiry date | May 16, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A specimen measuring device includes: a light source device that irradiates a specimen surface of a specimen with illumination light from multiple illumination units at a plurality of illumination angles; a spectral camera device that is arranged above the specimen surface, spectrally separates reflected light from the specimen surface, and acquires 2D spectral information through a single image capturing operation; and a calculating unit that calculates deflection angle spectral information of the specimen surface used to measure a measurement value of a certain evaluation item of the specimen using a change in an optical geometrical condition of an illumination direction and an image capturing direction between pixels in an X axis direction and a Y axis direction of the spectral information.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.