Flow control system, method, and apparatus
US9958302B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2016 |
| Grant date | May 1, 2018 |
| Priority date | — |
| Expiry date | Mar 31, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one embodiment, a control apparatus for delivery of a process gas includes an inlet conduit; a valve operably coupled to the inlet conduit and alterable between an open condition and a closed condition, the valve having a first conductance and being downstream of the inlet conduit; a characterized restrictor operably coupled to the valve, the characterized restrictor having a second conductance and being downstream of the valve; and an outlet conduit operably coupled to the characterized restrictor and being downstream of the characterized restrictor; wherein a ratio of the first conductance to the second conductance is 10:1 or higher.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.