Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device
US9958327B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2014 |
| Grant date | May 1, 2018 |
| Priority date | — |
| Expiry date | Dec 15, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70625
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The effective spot size of a spectroscopic metrology device is reduced through deconvolution of a measurement spectra set acquired from a measurement target combined with a training spectra set obtained from a training target. The measurement spectra set may be obtained using sparse sampling of a grid scan of a measurement target. The training spectra set is obtained from a grid scan of a training target that is similar to the measurement target. The training spectra set and the measurement spectra set include spectra from different grid nodes. Deconvolution of the measurement spectra and the training spectra sets produces an estimated spectrum for the measurement target that is an estimate of a spectrum from the measurement target produced with incident light having an effective spot size that is smaller than the actual spot size. One or more characteristics of the measurement target may then be determined using the estimated spectrum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.