Pressure sensor

US9958349B2 · kind B2 · utility

Assignee

• InvenSense, Inc. · US

Inventors

• Johannes Schumm · Zürich, CH
• Andreas Reinhard · Zollikon, CH
• Thomas Kraehenbuehl · Zürich, CH
• Stefan Thiele · Kahl am Main, DE
• Rene Hummel · Baar, CH
• Chung-Hsien Lin · Hsinchu, TW
• Wang Su · East Patchogue, US
• Tsung Lin Tang · Hsinchu, TW
• Chia-Min Lin · Hsinchu, TW

Key dates

• Filing date: Mar 30, 2016
• Grant date: May 1, 2018
• Expiry date: Mar 30, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2224/11
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.