Capacitive, ceramic pressure-measuring cell and method for the production thereof
US9958350B2 · kind B2 · utility
2Cited by
6References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 19, 2014 |
| Grant date | May 1, 2018 |
| Priority date | — |
| Expiry date | Nov 6, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/52
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A pressure-measuring cell having a ceramic measuring membrane and a ceramic counter body, wherein the measuring membrane is joined to the counter body in such a way that a pressure chamber is formed between the measuring membrane and the counter body. The pressure-measuring cell also has a capacitive transducer for detecting a pressure-dependent deformation of the measuring membrane, which capacitive transducer has at least one membrane electrode arranged on the measuring membrane and at least one electrode on the counter body side, wherein according to the invention at least one membrane electrode comprises a titanium oxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.