Pressure measuring cell, including a measuring membrane arranged at a measuring cell body via a joining structure
US9958352B2 · kind B2 · utility
1Cited by
1References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 16, 2014 |
| Grant date | May 1, 2018 |
| Priority date | — |
| Expiry date | Jun 16, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention is a pressure-measuring cell comprising a measuring cell body, a measuring membrane arranged on the front face of the measuring cell body by means of a joining structure, wherein the measuring cell body and the measuring membrane each have at least one measuring electrode, which electrodes form a measuring capacitor, and at least one support element provided on the measuring membrane and/or the measuring cell body within the joining structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.