Patent · US Active

Systems and methods for graphene mechanical oscillators with tunable frequencies

US9960734B2 · kind B2 · utility

0Cited by

1References

21Claims

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Assignee

The Trustees of Columbia University in the City of New York · US

Inventors

Changyao Chen · New York, US
James Hone · New York, US
Sunwoo Lee · Incheon, KR

Key dates

Filing date	Oct 23, 2014
Grant date	May 1, 2018
Priority date	—
Expiry date	Jun 26, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH03B2201/0275
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

A nano-electro-mechanical systems (NEMS) oscillator can include an insulating substrate, a source electrode and a drain electrode, a metal local gate electrode, and a micron-sized, atomically thin graphene resonator. The source electrode and drain electrode can be disposed on the insulating substrate. The metal local gate electrode can be disposed on the insulating substrate. The graphene resonator can be suspended over the metal local gate electrode and define a vacuum gap between the graphene resonator and the metal local gate electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.