Method for producing a gas sensor device for detecting at least one gaseous analyte, and gas sensor device for detecting at least one gaseous analyte

US9964514B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Markus Widenmeyer · Schenefeld, DE
• Andreas Letsch · Stuttgart, DE
• Denis Kunz · Untergruppenbach, DE
• Robert Roelver · Calw, DE

Key dates

• Filing date: Oct 9, 2015
• Grant date: May 8, 2018
• Expiry date: Oct 9, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N33/0027
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for producing a gas sensor device for detecting a gaseous analyte includes providing a sensor body comprising a semiconductor substrate, in which a cavity section is shaped, and a solid electrolyte layer arranged at a surface of the substrate. The electrolyte layer is not covered by the substrate in the cavity section. The method includes producing a signal conductor layer deposited dry-chemically at a substrate side of the sensor body, such that, in the region of the electrolyte layer not covered by the substrate in the cavity section, a cutout section is shaped in the signal conductor layer, in which the signal conductor layer is removed or not deposited. The method includes applying measuring electrodes to the electrolyte layer by a wet-chemical process. One measuring electrode is arranged in the cutout section and one measuring electrode is arranged on an electrolyte layer side of the sensor body.