Apparatus and method of manufacturing radiation detection panel
US9964652B2 · kind B2 · utility
1Cited by
1References
10Claims
0Family size
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Key dates
| Filing date | Sep 6, 2017 |
| Grant date | May 8, 2018 |
| Priority date | — |
| Expiry date | Sep 6, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/202
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
According to one embodiment, an apparatus of manufacturing a radiation detection panel, includes an evaporation source configured to evaporate a scintillator material and emit the scintillator material vertically upward, a holding mechanism located vertically above the evaporation source, and holding a photoelectric conversion substrate, and a heat conductor arranged opposite to the holding mechanism with a gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.