Patent · US Active

Structure for fastening together resin members in substrate storing container

US9966288B2 · kind B2 · utility

1Cited by
4References
4Claims
0Family size

Assignee

Inventor

Key dates

Filing dateOct 16, 2013
Grant dateMay 8, 2018
Priority date—
Expiry dateOct 16, 2033

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/6773
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

The lower lid includes a bottom plate that supports the substrate storing container and a lower lid peripheral wall that extends upwards from a periphery of the bottom plate. The sleeve member has a tubular shape having an axial center that extends in the vertical direction. The upper lid has a top plate and an upper lid peripheral wall that extends downwards. The lower lid includes device positioning portions. The device positioning portions can engage the positioned portion of the lifting device that lifts, from the lower lid, the substrate storing container which is supported by the lower lid in a state of the upper lid being removed therefrom.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.