Transfer head array and transferring method
US9969078B2 · kind B2 · utility
4Cited by
21References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2015 |
| Grant date | May 15, 2018 |
| Priority date | — |
| Expiry date | Aug 3, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/95136
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transfer head array includes a body and a plurality of transfer heads. The body has a first surface, a second surface opposite to the first surface, and a plurality of recesses. The first surface has at least one chucking region and at least one interference avoidance region, and the recesses are separated from each other and are disposed in the interference avoidance region. The transfer heads are disposed on the chucking region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.