Carbon nanofibers with sharp tip ends and a carbon nanofibers growth method using a palladium catalyst
US9970130B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 24, 2015 |
| Grant date | May 15, 2018 |
| Priority date | — |
| Expiry date | Mar 17, 2036 |
Classification
- Technology area (CPC D)Textiles; Paper
- CPC primaryD01F9/127
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a carbon nanofibers growth method including (S1) depositing an alumina layer on a silicon substrate, (S2) depositing palladium on the alumina layer to form a palladium catalyst layer, and (S3) growing carbon nanofibers on the palladium catalyst layer by a chemical vapor deposition (CVD) method, and carbon nanofibers vertically grown on an alumina layer-deposited silicon substrate, the carbon nanofibers having tip ends with a radius of curvature less than or equal to 5 nm, a diameter less than or equal to 50 nm, a length more than or equal to 1 mm, and a length-diameter aspect ratio more than or equal to 50,000.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.