Micro-electric mechanical system control valve and method for controlling a sensitive fluid
US9970572B2 · kind B2 · utility
0Cited by
19References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2015 |
| Grant date | May 15, 2018 |
| Priority date | — |
| Expiry date | Apr 1, 2036 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K99/0042
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A valve assembly is configured to regulate the flow of an isolated fluid therethrough and includes a first valve stage configured to control the flow of a first fluid through a first fluid circuit, and a second valve stage configured to control the flow of a second fluid through a second fluid circuit. The first valve stage is connected to the second valve stage such that the first fluid acts on the second valve stage to move the second valve stage between open and closed positions. The second fluid flowing through the second valve stage is also isolated from the first fluid flowing through the first valve stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.