Gas sensors with contact pads

US9970914B1 · kind B1 · utility

Assignee

• The United States of America as represented by the Administrator of the National Aeronautics and Space Administration · US

Inventors

• Jennifer C. Xu · Westlake, US
• Gary W. Hunter · Oberlin, US

Key dates

• Filing date: Apr 6, 2015
• Grant date: May 15, 2018
• Expiry date: Nov 7, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D62/8325
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Systems, methods, and other embodiments associated with gas detecting sensors. According to one embodiment, a gas sensor includes a metal layer, a barrier interlayer, a substrate layer, a first insulating layer, a conduction path, a contact pad, and a second insulating layer. The conduction path connects the metal layer to the contact pad. The second insulating layer prevents diffusion through the contact pad, the conduction path, or the metal layer. The sensor includes a wire bonded electrical connection to the contact pad such that voltage can be determined and/or applied.