Substrate transfer apparatus and system
US9975709B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 3, 2016 |
| Grant date | May 22, 2018 |
| Priority date | — |
| Expiry date | Dec 13, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67766
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate transfer apparatus and a substrate transfer system are disclosed. The substrate transfer apparatus including a main body and a plurality of main arms arranged side by side on the main body, wherein a plurality of branch arms are disposed on both sides of each of the main arms, and the plurality of main arms and the plurality of branch arms are disposed in a same supporting plane. When a substrate is transferred, the plurality of main arms and the plurality of branch arms are both disposed beneath the substrate and support the substrate together. Therefore, the downward recess of the substrate due to gravity action can be greatly reduced, so that the flatness of the substrate can be effectively improved, therefore, the display quality of the display product produced can be improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.