Electrode, ferroelectric ceramics and manufacturing method thereof
US9976219B2 · kind B2 · utility
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3Claims
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Key dates
| Filing date | Feb 12, 2015 |
| Grant date | May 22, 2018 |
| Priority date | — |
| Expiry date | Apr 13, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/8554
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
To obtain a piezoelectric film having excellent piezoelectric properties. An aspect of the present invention relates to ferroelectric ceramics including a first Sr(Ti1-xRux)O3 film and a PZT film formed on the first Sr(Ti1-xRux)O3 film, wherein the x satisfies a formula 1 below.0.01≤x≤0.4 formula 1
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.