Exhaust filter module, and a method and apparatus for efficiency testing the same
US9976770B2 · kind B2 · utility
3Cited by
24References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2006 |
| Grant date | May 22, 2018 |
| Priority date | — |
| Expiry date | Aug 13, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N1/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A filter module configured for exhaust application, and a method and apparatus for testing the same are provided. In one embodiment, the filter module includes a downstream sampling port configured to allow a technician to sample flow, downstream of the filter module, from the cleanroom side of a filter module. In another embodiment, a shroud adapted to sealing engage a filter module under test is provided and includes a tube, disposed in the shroud, that couples a port to a downstream sampling port of the filter module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.