Thermal flow meter
US9976886B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 29, 2014 |
| Grant date | May 22, 2018 |
| Priority date | — |
| Expiry date | Jun 22, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P5/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In order to provide a thermal flow meter capable of preventing adherence of contaminants to an air flow sensing portion, the thermal flow meter (300) of the invention includes a bypass passage for flowing a measurement target gas (30) received from a main passage (124) and an air flow sensing portion (602) for measuring a flow rate of the measurement target gas (30) by performing heat transfer with the measurement target gas (30) flowing through the bypass passage through a heat transfer surface (437). The air flow sensing portion (602) is provided to be exposed to an exposed surface (402) arranged along a flow direction of the measurement target gas (30) inside the bypass passage is embedded, the mount support surface (402) has a stage (407) formed to surround a periphery of the air flow sensing portion (602), and an inner portion surrounded by the stage protrudes more than an outer portion of the stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.