Patent · US Active

Wider dynamic accuracy range for gas delivery devices

US9976887B1 · kind B1 · utility

1Cited by
7References
17Claims
0Family size

Inventors

Key dates

Filing dateJul 30, 2014
Grant dateMay 22, 2018
Priority date
Expiry dateDec 20, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01F25/15
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A mass flow meter utilizes both positive and negative slopes of operating curves for first and second thermal sensors for a wider dynamic range. First and second interfaces receive first and second signal readings from first and second thermal sensors. A selection module identifies a zone from the first and second output signals and determines an assigned thermal sensor for the zone from the zone table, regardless of whether the thermal sensor output signals from a positive or negative slope of an operating curve.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.