Wider dynamic accuracy range for gas delivery devices
US9976887B1 · kind B1 · utility
Inventors
Key dates
| Filing date | Jul 30, 2014 |
| Grant date | May 22, 2018 |
| Priority date | — |
| Expiry date | Dec 20, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F25/15
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow meter utilizes both positive and negative slopes of operating curves for first and second thermal sensors for a wider dynamic range. First and second interfaces receive first and second signal readings from first and second thermal sensors. A selection module identifies a zone from the first and second output signals and determines an assigned thermal sensor for the zone from the zone table, regardless of whether the thermal sensor output signals from a positive or negative slope of an operating curve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.