Method to analyze spectroscopic ellipsometry data of porous samples utilizing the anisotropic Bruggeman-effective medium theory
US9976902B1 · kind B1 · utility
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Key dates
| Filing date | May 22, 2017 |
| Grant date | May 22, 2018 |
| Priority date | — |
| Expiry date | May 22, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06K15/225
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methodology of characterizing pore size and distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on a Bruggerman effective medium.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.