Test device for testing plurality of samples and operating method thereof
US9977071B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2014 |
| Grant date | May 22, 2018 |
| Priority date | — |
| Expiry date | Sep 11, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2608
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A test device includes: a testing unit connected with a measurement line, and configured to apply bias to the measurement line and measure the measurement line; a plurality of switching units configured to electrically connect the measurement line and the plurality of samples; and a control unit configured to sequentially turn on the plurality of switching units to sequentially apply the bias to the plurality of samples. The control unit determines whether a corresponding device sample has a defect based on a first measurement value according to measurement by the testing unit when the bias is applied to each of the plurality of samples.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.