Pellicle for EUV
US9977326B2 · kind B2 · utility
1Cited by
2References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 18, 2016 |
| Grant date | May 22, 2018 |
| Priority date | — |
| Expiry date | Oct 18, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/2004
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A pellicle is proposed in which an adhesive layer which adheres a pellicle film to a pellicle frame is mixed (filled) with powder of thermally conductive material such as metallic compound so that the heat generated by the strong EUV ray is quickly passed to the pellicle frame from the pellicle film lest the latter is deformed by the heat.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.