Capacitive force sensor with diaphragm body having an extending free end forming a cantilever portion

US9983077B2 · kind B2 · utility

Assignee

• Preh GmbH · DE

Inventors

• Thilo Schultheis · Bad Neustadt an der Saale, DE
• Johannes Duenninger · Wittershausen, DE

Key dates

• Filing date: Nov 9, 2015
• Grant date: May 29, 2018
• Expiry date: Nov 9, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L5/0038
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A capacitive force sensor includes a base body, a diaphragm body, two spacers arranged between the base body and the diaphragm body, the two spacers supporting the diaphragm body on the base body, a free end formed by the diaphragm body projecting beyond one of the two spacers, a cavity formed between the diaphragm body and the base body in a region between the two spacers so that the diaphragm body bends when a force acts on the diaphragm body in the region between the two spacers, a first electrode arranged at the free end, a second electrode arranged on the base body, and an electrical contact device which makes an electrical contact with the first and second electrode. The first and second electrode define a precision capacitance meter with a measuring capacitance which changes with an action of the force.