Optical-mechanical vibrating beam accelerometer
US9983225B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 14, 2016 |
| Grant date | May 29, 2018 |
| Priority date | — |
| Expiry date | Dec 2, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/0687
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems, devices, techniques, and methods are disclosed for an opto-mechanical vibrating beam accelerometer. In one example, a system is configured to couple a laser into optical resonance with opto-mechanically active (OMA) anchors suspending a proof mass; lock frequencies of the laser to optical resonances of the OMA anchors, resulting in a modulated laser coupled with the OMA anchors; demodulate a photocurrent that detects the modulated laser coupled with the OMA anchors to detect at least an amplitude or a phase of the modulated laser; lock a frequency of the modulated laser to dynamically track instantaneous resonance frequencies of mechanical modes of the OMA anchors through changes to the amplitude or phase of the modulated laser induced by coupling of the modulated laser to the OMA anchors; and measure an acceleration based on instantaneous resonance frequencies of the OMA anchors through changes to the amplitude or phase of the modulated laser.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.